2024-05-182024-05-1823500https://scholars.lib.ntu.edu.tw/handle/123456789/719293Integrated Micro/Nanoelectromechanical Resonators & Resonant SwitchesZero Quiescent Power RadioUltra-Low Power Sensing TechnologiesAdvanced Materials & Micro/Nanofabrication Technologies for High-Q MEMSIntegrated Micro/Nanoelectromechanical Resonators & Resonant SwitchesZero Quiescent Power RadioUltra-Low Power Sensing TechnologiesAdvanced Materials & Micro/Nanofabrication Technologies for High-Q MEMS