A catalyst to change everything: MEMS/NEMS - A paradigm of Taiwan's nanotechnology program

Lee, C.K.C.K.LeeWu, M.K.M.K.WuYang, J.C.J.C.YangCHIH-KUNG LEE2020-04-282020-04-282002https://scholars.lib.ntu.edu.tw/handle/123456789/486277A catalyst to change everything: MEMS/NEMS - A paradigm of Taiwan's nanotechnology programjournal article10.1023/A:10216693123962-s2.0-0036920608https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036920608&doi=10.1023%2fA%3a1021669312396&partnerID=40&md5=932a3a7ffb6db276b09d9e54c11f8dc7