Micro-System Displacement and Profile Measurement by an Integrated Photon Tunneling and Confocal Microscope

Chen, Wen-JongWen-JongChenHuang, Long-SunLong-SunHuangCHIH-KUNG LEEChu, Ta-ShunTa-ShunChuYeh, W.-F.W.-F.YehLu, Shui-ShongShui-ShongLuCheng, Ying-ChouYing-ChouCheng2009-01-212018-06-292009-01-212018-06-292002http://ntur.lib.ntu.edu.tw//handle/246246/107111application/pdf974366 bytesapplication/pdfen-US[SDGs]SDG11Micro-System Displacement and Profile Measurement by an Integrated Photon Tunneling and Confocal Microscope10.1017/S17277191000040812-s2.0-0037523429WOS:000180320200002http://ntur.lib.ntu.edu.tw/bitstream/246246/107111/1/05.pdf