A plastic-fibre-bundle-based transducer array for mapping and detection of the end point for dissolution of a photoresist

Lin, G.-R.G.-R.LinHorng, J.S.J.S.HorngGONG-RU LIN2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0035282442&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293528A plastic-fibre-bundle-based transducer array for mapping and detection of the end point for dissolution of a photoresistjournal article10.1088/0957-0233/12/3/305