Imaging SIMS at 20 nm Lateral Resolution:Exploratory Research Applications

王玉麟Levi-Setti, R.R.Levi-SettiCrow, G.G.CrowWang, Yuh-LinYuh-LinWang2009-01-232018-06-282009-01-232018-06-281987http://ntur.lib.ntu.edu.tw//handle/246246/110851en-USImaging SIMS at 20 nm Lateral Resolution:Exploratory Research Applicationsconference paper