A theoretical model on pore size distribution in low dielectric constant nanoporous silica films

JYH-PING HSUHung, Shih-HsingShih-HsingHungWEN-CHANG CHEN2008-11-262018-06-282008-11-262018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/87080http://ntur.lib.ntu.edu.tw/bitstream/246246/87080/1/10.pdfapplication/pdf525966 bytesapplication/pdfen-USA theoretical model on pore size distribution in low dielectric constant nanoporous silica filmsjournal article10.1016/j.tsf.2004.03.0012-s2.0-10644297257WOS:000226169800002http://ntur.lib.ntu.edu.tw/bitstream/246246/87080/1/10.pdf