Study of Hole-Machining on Pyrex Wafer by Electrochemical Discharge Machining (ECDM)

Liao, Yunn ShiuanYunn ShiuanLiaoPeng, Wen YangWen YangPengYUNN-SHIUAN LIAO2020-01-132020-01-1320061662-9752https://scholars.lib.ntu.edu.tw/handle/123456789/448705Study of Hole-Machining on Pyrex Wafer by Electrochemical Discharge Machining (ECDM)journal article10.4028/www.scientific.net/MSF.505-507.1207https://www.scientific.net/MSF.505-507.1207