Analysis 2.5-D permutation power transmission line to decrease electro-magnetic influence at high technology nano-fab

Y.-L. SongC.YuF.-C. ChuangY.-C. TsengJ.-Y. ZouS.-K. HsuT.-G. MaT.-L. WuL.-M. ChangTZONG-LIN WU2018-09-102018-09-102011-10http://scholars.lib.ntu.edu.tw/handle/123456789/366580[SDGs]SDG9Analysis 2.5-D permutation power transmission line to decrease electro-magnetic influence at high technology nano-fabconference paper10.4028/www.scientific.net/AMR.356-360.27112-s2.0-80555153478