Growth and characterization of nitrogen-doped C-face 4H-SiC epilayers

Chen, W.W.ChenLee, K.-y.K.-y.LeeCapano, M.A.M.A.CapanoKUNG-YEN LEE2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-33845575886&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/320905Growth and characterization of nitrogen-doped C-face 4H-SiC epilayersjournal article10.1016/j.jcrysgro.2006.09.033