An optical flatness measurement system for medium-sized surface plates

Fan, Kuang-ChaoKuang-ChaoFanShiou, Fang-JungFang-JungShiou2008-11-182018-06-282008-11-182018-06-281997http://ntur.lib.ntu.edu.tw//handle/246246/86547application/pdf848430 bytesapplication/pdfen-USAn optical flatness measurement system for medium-sized surface platesjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86547/1/02.pdf