臺灣大學: 機械工程學研究所張所鋐蔡佳倫Tsai, Jia-LunJia-LunTsai2013-04-012018-06-282013-04-012018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/256173本論文使用直接控制催化劑顆粒大小的方法來成長尺寸均勻的螺旋碳管，而且提出一種混合式的催化劑製備方式來製備催化劑，一般催化劑製備方式有三種：1.薄膜式催化劑 2.溶液式催化劑 3.粉末式催化劑，本論文使用薄膜式催化劑加上粉末式催化劑，各取其優點，成長出均勻之螺旋碳管。 催化劑製備方式為先在SiO2基板上鍍上一層鐵薄膜，然後再把均勻散佈在酒精裡面的二氧化錫粉末使用旋轉塗佈機塗佈在試片表面，再使用化學氣相沉積法來成長螺旋碳管，最後再使用掃描式電子顯微鏡做觀察，並統計其線徑、外徑、螺距等三項特徵尺寸，同時統計量率，並觀察鐵薄膜厚度對於成長螺旋碳管尺寸及良率的影響。 以此混合式催化劑製備方式所成長出來之螺旋碳管，良率可高達90%，外徑可控制在2~5μm，線徑在300~500nm，螺距在1.5~2μm，而且與一般螺旋碳管最大不同之處在於外徑與螺距較大，線徑較小，有較高的外徑線徑比和螺距線徑比，比以往所成長出來的螺旋碳管更接近彈簧的形狀。In the study, we try to control the catalyst particles size to growth uniform carbon micro-coils, and bring out a method to produce mixed catalyst. We combine thin-film catalyst with powdered catalyst to synthesize uniform carbon micro-coils. First, we evaporate a thin film of iron on SiO2, and then spin coating tin oxide (which mixing with alcohol) on substrate. After that, we synthesize carbon micro-coils by chemical vapor deposition, which are obtained by pyrolysis of acetylene at 700℃, under 1 atm. The growing results have been observed by SEM and TEM. Coils’ line diameter, coil diameter, pitch and yield are the main characteristic which we concern about, and then we analysis how catalyst size effects the size of carbon coils. In summary, carbon micro-coils with controlled diameters have average coil diameter: 3.36 μm, line diameter: 385 nm, pitch: 1.82 μm and growing yield is about 90%. There are different morphologies of as-grown carbon nanocoils from this work and other literature. And we found that the tin oxide particle size has a relation with the line diameter, both the thickness of thin film of iron has a relation with the coil diameter. By using mixed catalyst, we can produce carbon micro-coils with high yield.7855279 bytesapplication/pdfen-US螺旋碳管催化劑良率化學氣相沉積法尺寸控制Carbon coilsCatalystyieldChemical vapor depositionDiameter Controlthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/256173/1/ntu-99-R97522620-1.pdf