YAO-WEN CHANGLiu, R.-G.R.-G.LiuFang, S.-Y.S.-Y.Fang2018-09-102018-09-102015http://www.scopus.com/inward/record.url?eid=2-s2.0-84944128126&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/393140EUV and e-beam manufacturability: Challenges and solutionsconference paper10.1145/2744769.27479252-s2.0-84944128126