Mallela M.STsai J.-HHuang J.-ZHsu C.-CChen M.-HWu C.-IChen J.-ZJERRY CHENG-CHE HSUJIAN-ZHANG CHENI-CHUN CHENG2022-03-222022-03-22202200223727https://www.scopus.com/inward/record.uri?eid=2-s2.0-85118768290&doi=10.1088%2f1361-6463%2fac2bcd&partnerID=40&md5=a7c64db76050151c91c32db3cc3b8699https://scholars.lib.ntu.edu.tw/handle/123456789/598223For attaining good-performance perovskite solar cells (PSCs), the carrier collection from the perovskite material to the transport layer plays a prominent role; herein, we demonstrate an atmospheric pressure plasma treatment technique to enhance the interface properties between the active perovskite layer and electron transport layer (ETL). A scan-mode low-temperature helium dielectric barrier discharge (DBD) jet is applied to process the TiO2 nanoparticle layers for the flexible n-i-p PSCs made on ITO-coated polyethylene naphthalate substrates. When the surface of TiO2 nanoparticle ETL is treated by the DBD jet at a scan rate of 2 cm s-1 and scan height of 5 cm by ten times, the photoelectrical conversion efficiency of the cell is enhanced from 12.30% to 13.66%. The performance improvement can be attributed to the increase of hydrophilic O-C = O functional groups on the surface of the TiO2 nanoparticle layer and the reduction of charge transfer resistance of the cell revealed by x-ray photoelectron spectroscopy and electrochemical impedance spectroscopy, respectively. The results show that the low-temperature DBD jet treatment is a promising technique for processing flexible photovoltaic devices. ? 2021 IOP Publishing Ltd.atmospheric pressure plasmadielectric barrier dischargeflexible perovskite solar cellTiO2nanoparticleAtmospheric pressureCharge transferDielectric devicesElectric dischargesElectrochemical impedance spectroscopyElectron transport propertiesFlow controlHigh-k dielectricPerovskitePerovskite solar cellsPlasma applicationsPlasma jetsTemperatureTiO2 nanoparticlesX ray photoelectron spectroscopyAtmospheric pressure plasmasDielectric barrier dischargesDischarge jetElectron transport layersFlexible perovskite solar cellLows-temperaturesNanoparticle layersPerformanceTiO2 nano-particlesTitanium dioxide[SDGs]SDG7journal article10.1088/1361-6463/ac2bcd2-s2.0-85118768290