A novel technique for the fabrication of herringbone grooves in a dynamic thrust bearing combining UV-LIGA with electro-discharge machining

Kuo, J.S.J.S.KuoChiu, K.T.K.T.ChiuHsu, S.W.S.W.HsuPING-HEI CHENYUNN-SHIUAN LIAO2020-01-132020-01-132006https://scholars.lib.ntu.edu.tw/handle/123456789/448665A novel technique for the fabrication of herringbone grooves in a dynamic thrust bearing combining UV-LIGA with electro-discharge machiningjournal article10.1007/s00542-005-0053-32-s2.0-33645910524https://www.scopus.com/inward/record.uri?eid=2-s2.0-33645910524&doi=10.1007%2fs00542-005-0053-3&partnerID=40&md5=81e7459d34e6882c8adaa00c6f8d3802