Beam model and three dimensional numerical simulations on suspended microchannel resonators

Huang, K.-R.K.-R.HuangChang, J.-S.J.-S.ChangChao, S.D.S.D.ChaoKUANG-CHONG WUSHENG-DER CHAO2020-04-282020-04-282012https://scholars.lib.ntu.edu.tw/handle/123456789/486917Beam model and three dimensional numerical simulations on suspended microchannel resonatorsjournal article10.1063/1.47703212-s2.0-84871854782https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871854782&doi=10.1063%2f1.4770321&partnerID=40&md5=c99109092bcee72740daaea0f1533dfa