Could a Die Be Disposable?-- Design and Test of a Silicon-Wafer-Based Slot Die Coater

An-Bang WangYu-Wen HsiehYu-Ju LiuTzu-Yao LinAN-BANG WANG2020-05-142020-05-142012https://scholars.lib.ntu.edu.tw/handle/123456789/492606Atlanta, GA, USACould a Die Be Disposable?-- Design and Test of a Silicon-Wafer-Based Slot Die Coaterconference paper