A Nano Grating Tunable MEMS Optical Filter for High-Speed On-Chip Multispectral Fluorescent Detection

S. C. TruxalN. -T. HuangK. KurabayashiNIEN-TSU HUANG2018-09-102018-09-102009-09http://scholars.lib.ntu.edu.tw/handle/123456789/352311[SDGs]SDG7A Nano Grating Tunable MEMS Optical Filter for High-Speed On-Chip Multispectral Fluorescent Detectionconference paper10.1109/IEMBS.2009.53332872-s2.0-77950963652