APPARATUS AND METHOD FOR TREATING GRAPHENE USING PLASMA AND APPLICATION THEREOF

I-Chun ChengJian-Zhang ChenCheng-Che HsuPi-Tai ChouHsiao-Wei LiuHaoming ChangSheng-ping LiangTing-Jui WuI-CHUN CHENG2019-10-312019-10-312018https://scholars.lib.ntu.edu.tw/handle/123456789/429535APPARATUS AND METHOD FOR TREATING GRAPHENE USING PLASMA AND APPLICATION THEREOFpatent美國專利證號 US9908779 B2