Liu C.-K.Chien H.-C.Dai M.-J.Yu C.-K.Hsu C.-Y.Huang M.-J.Luo G.-L.2019-06-182019-06-1820080791842924; 9780791842928https://www.scopus.com/inward/record.uri?eid=2-s2.0-49449088713&doi=10.1115%2fMNHT2008-52183&partnerID=40&md5=8b0a2ca219e1897ff6f9f8918f189f72https://scholars.lib.ntu.edu.tw/handle/123456789/411159[SDGs]SDG7Thermal conductivity of Si/SiGe superlattice filmconference paper10.1115/MNHT2008-521832-s2.0-49449088713