The growth of high-quality SiGe films with an intermediate Si layer

Lee, S.W.S.W.LeeChen, P.S.P.S.ChenTsai, M.-J.M.-J.TsaiChia, C.T.C.T.ChiaLiu, C.W.C.W.LiuChen, L.J.L.J.ChenCHEE-WEE LIU2020-06-162020-06-162004https://scholars.lib.ntu.edu.tw/handle/123456789/502094The growth of high-quality SiGe films with an intermediate Si layerconference paper10.1016/S0040-6090(03)01068-X2-s2.0-1342281314https://www.scopus.com/inward/record.uri?eid=2-s2.0-1342281314&doi=10.1016%2fS0040-6090%2803%2901068-X&partnerID=40&md5=66c90e312e73a90b147bca39736dfa28