Photoconductivity and UV detection of amorphous silicon carbon nitride thin films

Chen, C-WC-WChenHuang, C-CC-CHuangLinY-YChen, L-CL-CChenChen, K-HK-HChenSu, W-FW-FSu2009-02-252018-06-282009-02-252018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/141108en-USPhotoconductivity and UV detection of amorphous silicon carbon nitride thin filmsjournal article