A circular micromirror array fabricated by a maskless post-CMOS process

Cheng, Ying-ChouYing-ChouChengDai, Ching-LiangChing-LiangDaiLee, Chi-YuanChi-YuanLeeChen, Ping-HeiPing-HeiChenChang, Pei-ZenPei-ZenChang2008-10-282018-06-282008-10-282018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/85736http://ntur.lib.ntu.edu.tw/bitstream/246246/85736/1/07.pdfapplication/pdf700080 bytesapplication/pdfen-USA circular micromirror array fabricated by a maskless post-CMOS processjournal article10.1007/s00542-004-0486-02-s2.0-18744396111WOS:000229835800009http://ntur.lib.ntu.edu.tw/bitstream/246246/85736/1/07.pdf