Oxidation of Chemically Vapor-Deoposited Silicon Nitride in Dry Oxygen at 1923 to 2003 K

林瑞陽Takayuki NarushimaYasutaka IguchiToshio HiraiLin, Ray Y.Ray Y.Lin2009-02-252018-06-282009-02-252018-06-281993http://ntur.lib.ntu.edu.tw//handle/246246/141103en-USOxidation of Chemically Vapor-Deoposited Silicon Nitride in Dry Oxygen at 1923 to 2003 Kjournal article