In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor

Lee, C.-Y.C.-Y.LeeCheng, Y.-C.Y.-C.ChengWu, T.-T.T.-T.WuChen, Y.-Y.Y.-Y.ChenChen, W.-J.W.-J.ChenPao, S.-Y.S.-Y.PaoChang, P.-Z.P.-Z.ChangChen, Ping-HeiPing-HeiChen2011-02-112018-06-282011-02-112018-06-282004-06http://ntur.lib.ntu.edu.tw//handle/246246/222364en-USIn-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensorjournal article