Design and fabrication of phononic crystals in surface acoustic micro devices

Gu, K.-B.K.-B.GuChang, ChienliuChienliuChangShieh, J.-C.J.-C.ShiehShih, W.-P.W.-P.Shih2013-04-112018-06-282013-04-112018-06-282006http://ntur.lib.ntu.edu.tw//handle/246246/257176465332 bytesapplication/pdfen-USDesign and fabrication of phononic crystals in surface acoustic micro devicesconference paper10.1109/MEMSYS.2006.1627892http://ntur.lib.ntu.edu.tw/bitstream/246246/257176/1/79.pdf