Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systems

Chin-Khai TangMing-Shing SuYi-Chang LuYI-CHANG LU2019-10-312019-10-31201519325150https://scholars.lib.ntu.edu.tw/handle/123456789/429929Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systemsjournal article10.1117/1.jmm.14.3.0312122-s2.0-84939236111