Hydrogen in ultralow temperature SiO <inf>2</inf> for nanocrystalline silicon thin film transistors

Kattamis, A.A.KattamisCheng, I.-C.I.-C.ChengAllen, S.S.AllenWagner, S.S.WagnerI-CHUN CHENG2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-12844269221&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/309178Hydrogen in ultralow temperature SiO <inf>2</inf> for nanocrystalline silicon thin film transistorsconference paper