Y.-J. YangC.-M. ChienM. KamonV. L. RabinovichJ. R. GilbertYAO-JOE YANG2021-11-252021-11-252005https://scholars.lib.ntu.edu.tw/handle/123456789/587823https://www.scopus.com/inward/record.uri?eid=2-s2.0-29744451546&doi=10.1017%2fs1727719100000666&partnerID=40&md5=81aab227733d45398d88f7d08ccc6031Extraction of Frequency Dependent Macromodels for MEMS Squeeze-film Damping Effectsjournal article10.1017/s17277191000006662-s2.0-29744451546