2007-10-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/684035摘要：本研究計劃將有系統地建立一套具備診斷與分析能力的電漿系統。這套系統所建立之多種電漿檢測儀器，具有即時與現地之檢測能力。在具備多重檢能力之同時，亦保留此系統從事低尺度材料（奈米粉體與奈米管等）製備與表面改質等之製程能力。 　　本研究所建立之電漿系統為一電容耦合式電漿(Capacitively coupled plasma)，藉由反應器、電極與匹配器的精密設計，能夠將同一反應器改裝為電感耦合式電漿系統(Inductively coupled plasma)。檢測工具方面，本研究將於上述電漿系統中建立多項檢測裝置，包括：光學放射光譜分析儀 (Optical emission spectrometer)、阻抗量測器 (Impedance probe)、靜電探針 (Langmuir probe) 與離子電流探針 (Ion current probe) 等四項檢測裝置。此四種檢測工具在適當的整合之下，能同時進行現地之檢測。本研究並將探討若干尚未有定論之課題，例如以電漿進行表面改質時最重要之物質以及電極的設計對製程的影響。 　　本研究於現階段著重於電漿檢測與分析能力的建立與提昇、多項檢測工具之整合以及檢測與電漿特性之關聯性的建立。藉由此一有系統的研究工作來探討電漿科學之相關課題並尋求電漿製程在學術與工業上更廣泛之應用。 <br> Abstract: The focus of this proposal is the development of a diagnostic plasma system equipped with multiple diagnostic tools. This system is designed to be capable of studying multiple plasma characteristics while remaining the capability for materials processing including, but not limited to, lower dimensional materials fabrication and surface treatment. This is a low pressure capacitively coupled plasma with a well-designed electrode and matching network. This system can be converted to an inductively coupled plasma system. The diagnostic tools include an optical emission spectrometer, an impedance probe, a Langmuir probe, and an ion flux probe. These diagnostic tools allow for in situ and real time plasma diagnostics. The information obtained by the above diagnostic tools will be integrated and the correlation among the plasma system design, operation regime, and plasma characteristics will be established. The key factors that dominate the plasma characteristics will be identified and be tested. This project has both fundamental and applicational significance. This diagnostic plasma system is anticipated to be able to investigate fundamental phenomena involving plasma chemistry, plasma physics and plasma-surface interactions. The foundation of the basic knowledge will be formed through this work. By the integration of the plasma processing and the diagnostic capability, we are particularly interested in answering the questions that have not yet been answered, such as the dominant species for surface treatment and how the geometric parameters affect the process. Meanwhile, we are seeking for the applications with academic and industrial interest.電漿診斷光譜分析阻抗靜電探針Plasma Diagnosticsoptical emission spectrometryimpedance measurementslangmuir probe