Study on the performance of InGaN-based micro-LED by plasma etching combined with ion implantation process

Yun-Cheng HsuYu-Hsuan HsuChien-Chung LinMing Hsien WuHao Chung KuoDong-Sing WuuChing-Lien HsiaoRay-Hua Horng2025-05-092025-05-092025https://www.scopus.com/record/display.uri?eid=2-s2.0-105000150828&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/729215true[SDGs]SDG7Study on the performance of InGaN-based micro-LED by plasma etching combined with ion implantation processjournal article10.1016/j.nxnano.2024.1001012-s2.0-105000150828