Fabrication of buried waveguide microstructure using gas-assisted micro/nanoimprinting with soft mold

Weng, Y.-J.Y.-J.WengYang, S.-Y.S.-Y.YangWeng, Y.-C.Y.-C.WengLON A. WANG2020-06-042020-06-042007https://scholars.lib.ntu.edu.tw/handle/123456789/497258[SDGs]SDG7Fabrication of buried waveguide microstructure using gas-assisted micro/nanoimprinting with soft moldjournal article10.1002/pat.9542-s2.0-38349008649https://www.scopus.com/inward/record.uri?eid=2-s2.0-38349008649&doi=10.1002%2fpat.954&partnerID=40&md5=3b1e1b90611aeaacf9364e653839c560