Hung, Shao-KangShao-KangHungHwu, En-TeEn-TeHwuHwang, Ing-ShouhIng-ShouhHwangLI-CHEN FU2009-02-252018-07-062009-02-252018-07-06200600214922http://ntur.lib.ntu.edu.tw//handle/246246/141105https://www.scopus.com/inward/record.uri?eid=2-s2.0-33645520207&doi=10.1143%2fJJAP.45.1917&partnerID=40&md5=cfda4147166366343913becba376df3bapplication/pdf329725 bytesapplication/pdfen-USFeedback control; Feedforward control; Hysteresis; Piezoelectric nonlinearity; Scanning probe microscopyAlgorithms; Hysteresis; Image analysis; Microscopic examination; Piezoelectric devices; Problem solving; Scanning; Feedforward control; Piezoelectric nonlinearity; Scanning probe microscopy (SPM); Feedback controljournal article10.1143/JJAP.45.19172-s2.0-33645520207http://ntur.lib.ntu.edu.tw/bitstream/246246/141105/1/32.pdf