Design and fabrication of sub-wavelength annular apertures for femtosecond laser machining

Hsu, K.-Y.K.-Y.HsuTung, Y.-C.Y.-C.TungChung, M.-H.M.-H.ChungCHIH-KUNG LEE2020-04-282020-04-282015https://scholars.lib.ntu.edu.tw/handle/123456789/486129[SDGs]SDG7[SDGs]SDG9Design and fabrication of sub-wavelength annular apertures for femtosecond laser machiningconference paper10.1117/12.20788042-s2.0-84930024752https://www.scopus.com/inward/record.uri?eid=2-s2.0-84930024752&doi=10.1117%2f12.2078804&partnerID=40&md5=f558d8599cae89349d872f0a138987bf