王維新臺灣大學：光電工程學研究所丁俞文Ting, Yu-WenYu-WenTing2007-11-252018-07-052007-11-252018-07-052007http://ntur.lib.ntu.edu.tw//handle/246246/50678本論文成功地探討在Z 切鈮酸鋰基板上以鎳金屬擴散式製作出適用於藍光波段(473nm)的方向耦合器和馬赫任德電光調變器；實驗結果顯示在波導寬度為1.8Both nickel-indiffused (NI) directional coupler and Mach-Zehnder modulator on Z-cut lithium niobate at blue laser wavelength (473nm) are successfully fabricated for the first time. Experimental results show that the coupling length for the nickel-indiffused directional coupler is 0.6773mm at a waveguide width of 1.8目錄 第一章 導論.....................................1 1-1 研究背景.....................................................1 1-2 研究動機.....................................................1 1-3 內容簡介.....................................................3 第二章 藍光鎳擴散式波導之設計...................4 2-1 鎳擴散式光波導簡介...........................................4 第三章 藍光方向耦合器元件之設計與製作...........7 3-1 元件原理簡介.................................................7 3-2 元件設計....................................................11 3-3 製作流程....................................................12 3-3.1 晶片切割..............................................12 3-3.2 光微影術..............................................13 3-3.3 金屬薄膜蒸鍍..........................................13 3-3.4 掀離法................................................14 3-3.5 高溫擴散..............................................14 3-3.6 研磨拋光..............................................15 3-3.7 量測系統..............................................15 3-4 實驗結果與討論.....,........................................17 3-4.1 製程條件..............................................17 3-4.2 光場模態之量測........................................19 3-4.3 耦合長度之量測........................................20 第四章 藍光鎳擴散式馬赫任德電光調變器之設計與製 作 .....................................22 4-1 元件原理簡介................................................22 4-2 元件設計....................................................28 4-3 製作流程....................................................29 4-3.1 製程步驟..............................................30 4-3.2 量測系統..............................................31 4-4 實驗結果與討論..............................................32 4-4.1 製程條件…............................................32 4-4.2 調變訊號之量測........................................34 第五章 光折效應之量測..........................37 5-1 光折效應原理...............................................37 5-2 光折效應量測系統之架設…...................................39 5-3 藍光方向耦合器之光折效應量測...............................40 5-4 藍光馬赫任德式電光調變器之光折效應量測.....................42 5-5 結果討論...................................................44 5-5.1藍光方向耦合器之光折效應討論..........................44 5-5.2藍光馬赫任德式電光調變器之光折效應討論................46 第六章 結論與未來展望..........................48 6-1 結論.......................................................48 6-2 未來展望...................................................48 參考文獻.........................................49 中英文名詞對照表.................................522319252 bytesapplication/pdfen-US藍光雷射鎳擴散方向耦合器馬赫任德電光調變器積體光學波導光折效應blue lasernickel indiffusiondirectional couplerMach-Zehnder modulatorIntegrated Opticswaveguidephotorefractive effectthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/50678/1/ntu-96-R94941010-1.pdf