Ting-Hang PeiKuen-Yu TsaiKUEN-YU TSAIJIA-HAN LI2018-09-102018-09-102010-02http://scholars.lib.ntu.edu.tw/handle/123456789/359311[SDGs]SDG7Stochastic simulation of photon scattering for EUV mask defect inspectionconference paper10.1117/12.8466952-s2.0-77953442543