2004-09-012024-05-13https://scholars.lib.ntu.edu.tw/handle/123456789/654230摘要：近年來隨著微機電 (MEMS, Micro-Electro-Mechanical System) 的快速發展, 傳統光學受到愈來愈多的重視因為光學元件將可因此微型化. 此種結合光學及微機電的科學又稱為光微機電 (Optical MEMS), 將會對我們未來在通訊, 資訊產業, 及生醫科技等日常生活上有著深遠的影響. 鏡片一直是光學中一個重要的元件. 但受限於傳統的製造技術, 鏡片通常體積龐大且焦距固定無法改變. 近年來在微機電技術協助下, 微米級 (micrometer) 的鏡片已被製造出來且具有可變焦的功能. 但微機電技術乃是從半導體製程發展而來, 因此鏡片的材料仍是以矽 (silicon) 為主而限制可應用的範圍. 為了克服上述困難, 另一種新的微機電製程正開始被發展. 有別於傳統以矽為主的微機電技術, 新的製程使用柔軟的高分子聚合物. 此方法和傳統的矽製程最大的差異在於除了堅硬的材質使用外, 還需加入可相容於傳統矽製程的高分子物質. 比起以矽為主的化合物, 這些高分子物質通常106 倍的柔軟並且可產生 1,000 倍以上的形變. 除此之外, 高分子聚合物可長成的厚度可從數奈<br> Abstract: Recently, optics receives more attention because of miniaturization technology, which is also known micromachining or MEMS (Micro-Electro-Mechanical Systems). The science to study both optics and MEMS is known as Optical MEMS, which might fundamentally affect our daily lives in the fields of data communication, information technology and biomedical instruments, etc. Lenses are used to be important components in optics. Traditionally, the lenses are made with rigid materials, such as glasses or plastics. Due to fabrication limits, traditional lens are relatively large and the focal lengths of lenses are fixed. With the help of MEMS technology, researcher starts to reduce the sizes of optical components to micrometer range and the surface curvatures of lenses are adjustable actively. However, the MEMS technology is derived from semiconductor industry and the material of lenses are most likely to be silicon dioxide or silicon nitride thin layers with limited adjustable range. In order to overcome difficulties mentioned above and explore the new territory of optical MEMS, a new class of MEMS devices has begun to surface -- components made with highly compliant polymeric materials as a principal design element. This platform differs from conventional MEMS by adding a set of softer, more compliant, polymeric materials to the list of conventional rigid silicon-based materials used in traditional MEMS. The compliant materials used in this new class of MEMS devices are as much as six orders of magnitude less stiff and can easily be tailored over a range of three orders of magnitude. Additionally, they can be deposited in a much broader range of layer thicknesses. This very wide range of flexibility expands the design space for MEMS devices far beyond what is possible with traditional silicon-based materials. There are several other advantages that compliant polymers enjoys over silicon-based MEMS, including &#8226; Mechanical deflection requires much lower energy, &#8226; Mechanical damping can be included to avoid high frequency noise, &#8226; Spin-on deposition techniques can simplify processing and lower costs, &#8226; Less precisely defined geometries can lower costs and improve yields, &#8226; Fewer discrete components provide better reliability at lower cost, and &#8226; Compact package design permits superior integration. Up to dates, there are still no systematic studies on how compliant polymers can be improved and be optimized due to the lack of fundamental understanding of material properties. In this project, we would like to explore this not-yet-well-known field and conduct both simulation and experiments on how the polymer material can be used to make deformable surface and its compatibilities with existing MEMS technology. The project will focus on the optical properties of polymer material fabricated by MEMS technology in the following areas, but not limited to 1.Surface roughness and its relation to polymer structures/f微光機電Optical MEMS