JUI-CHE TSAIWu, M.C.M.C.Wu2009-03-252018-07-062009-03-252018-07-06200610577157https://www.scopus.com/inward/record.uri?eid=2-s2.0-33749993568&doi=10.1109%2fJMEMS.2006.880291&partnerID=40&md5=0d67e349304f78c52a52ed149e7562c0We report on the design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array. The two-axis microelectromechanical-systems (MEMS) mirror is driven by electrostatic vertical comb-drive actuators through four motion amplifying levers. The maximum mechanical rotation angles are ± 6.7° at 75 V for both axes, leading to total optical scan angle of 26.8°. The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for 1 × N2 wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7 μm is also attained. © 2006 IEEE.application/pdf1311231 bytesapplication/pdfen-USComb-drive actuator; Leverage mechanism; Two-axis micromirror; Wavelength-division multiplexing (WDM); Wavelength-selective switch (WSS)Comb-drive actuator; Leverage mechanism; Two-axis micromirror; Two-axis scanner array; Electrostatic actuators; Metallizing; Mirrors; Natural frequencies; Wavelength division multiplexing; Microelectromechanical devicesjournal article10.1109/JMEMS.2006.8802912-s2.0-33749993568http://ntur.lib.ntu.edu.tw/bitstream/246246/147813/1/05.pdf