Nanolithography made from water-based spin-coatable LSMO resist

Chuang, Chih-MinChih-MinChuangMing-ChungWuHuang, Yu-ChingYu-ChingHuangCheng, Kuo-ChungKuo-ChungChengLin, Ching-FuhChing-FuhLinChen, Yang-FangYang-FangChenSu, Wei-FangWei-FangSu2010-09-022018-07-052010-09-022018-07-052006-08http://ntur.lib.ntu.edu.tw//handle/246246/193670en-USNanolithography made from water-based spin-coatable LSMO resistjournal article10.1088/0957-4484/17/17/0192-s2.0-38849132233WOS:000240018200019