Low-temperature gas-barrier films by atomic layer deposition for encapsulating organic light-emitting diodes

Tseng, M.-H.M.-H.TsengYu, H.-H.H.-H.YuChou, K.-Y.K.-Y.ChouJou, J.-H.J.-H.JouLin, K.-L.K.-L.LinWang, C.-C.C.-C.WangFENG-YU TSAI2020-05-122020-05-122016https://scholars.lib.ntu.edu.tw/handle/123456789/491225[SDGs]SDG6Low-temperature gas-barrier films by atomic layer deposition for encapsulating organic light-emitting diodesjournal article10.1088/0957-4484/27/29/2957062-s2.0-84976351871https://www.scopus.com/inward/record.uri?eid=2-s2.0-84976351871&doi=10.1088%2f0957-4484%2f27%2f29%2f295706&partnerID=40&md5=8e797418f591f7fbb6bd41eb26c371c7