A cantilever force sensor combined with a spherical reflecting mirror for sensitivity enhancement of an optical detection system

Liao, C.-D.C.-D.LiaoTsai, J.-C.J.-C.TsaiJUI-CHE TSAI2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-70350183734&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350113A cantilever force sensor combined with a spherical reflecting mirror for sensitivity enhancement of an optical detection systemjournal article10.1109/JSTQE.2009.2019615