臺灣大學: 電子工程學研究所林致廷陳有宣Chen, Yu-HsuanYu-HsuanChen2013-04-102018-07-102013-04-102018-07-102012http://ntur.lib.ntu.edu.tw//handle/246246/256699　　Today, point-of-care testing, individualized medicine and tele-medicine are the most critical points in the development of medicine. There must have the biological sensing technology which is fast, just-in-time and accurate to support the development of medicine. All these back-ups from the behind is to make the medicine development successful. With nano-technology being developed drastic, biomolecular sensing technology prospers tremendously well than ever before. Furthermore, much the newer sensing skill is developed thereby. Among the various new technology, the poly silicon nanowire field effect transistor biosensors is the most crucial one. It has the characteristic of high sensibility, low cost. It can be integrated with the standard production operation in order to be mass produced. This new technology has become the popular academic research topic. By the development of the poly silicon sensing technology, we meet the typical issue of the instability as such that it interrupt our go-ahead steps. In view of solving the problem thoroughly, using the technology of oxygen plasma, I have studied and submitted our theoretical researching on surface modification of poly silicon nanowire. By doing the experiments, it is concluded that the threshold voltage and on current to leakage current ratio of poly silicon nanowire field effect transistor biosensors are seen to be rising obviously. On the other hand, the poly silicon nanowire which is processed by surface immobilization to let the device has the ability of linking to the specific biomolecular. By using the interaction of Avidin/Streptavidin and Biotin, we can explore the generated effect when the drift electric field is applied in the sensing environment. From the result of my experiment, it is verified that the sensing ability of poly silicon nanowire field effect transitor biosensors is growing when drift electric field is used. Furthermore, I experiment the sensing phenomenon of Stretavidin and Avidin. It is found that the sensitivity of the device is completely different when different targets are sensed in testing. As above mentioned, the essay I made could verify that the bio molecular sensing technology has the big potential development future and it will bring big benefit to human life definitely.140 bytestext/htmlen-US多晶矽奈米線生物感測器氧電漿遷移電場poly silicon nanowirebiosensorsoxygen plasmadrift electric field[SDGs]SDG3thesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/256699/1/index.html