Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm

Chen, L.-C.L.-C.ChenHuang, Y.-T.Y.-T.HuangNguyen, X.L.X.L.NguyenChen, J.-L.J.-L.ChenChang, C.-C.C.-C.ChangLIANG-CHIA CHEN2020-01-132020-01-132009https://scholars.lib.ntu.edu.tw/handle/123456789/447878Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithmjournal article10.1016/j.optlaseng.2008.05.0162-s2.0-56949095728https://www.scopus.com/inward/record.uri?eid=2-s2.0-56949095728&doi=10.1016%2fj.optlaseng.2008.05.016&partnerID=40&md5=41033dd64af0f32467fc0351dba14f7c