Planarization of Amorphous Silicon Thin Film Transistors by Liquid Phase Deposition of Silicon Dioxide

Chen, M.-S.M.-S.ChenChou, J.-S.J.-S.ChouSI-CHEN LEE2018-09-102018-09-101995http://www.scopus.com/inward/record.url?eid=2-s2.0-0029409172&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316600Planarization of Amorphous Silicon Thin Film Transistors by Liquid Phase Deposition of Silicon Dioxidejournal article10.1109/16.469397