Mao, Y.-T.Y.-T.MaoKuo, K.-C.K.-C.KuoTseng, C.-E.C.-E.TsengHuang, J.-Y.J.-Y.HuangLai, Y.-C.Y.-C.LaiYen, J.-Y.J.-Y.YenLee, C.-K.C.-K.LeeChuang, W.-L.W.-L.ChuangJIA-YUSH YENCHIH-KUNG LEE2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-67650305962&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/347225Research on three dimensional machining effects using atomic force microscopejournal article10.1063/1.31256232-s2.0-67650305962WOS:000267600600038