Origin of Boron Contamination of Intrinsic a-Si:H in Glow Discharge

Tsai, H. K.H. K.TsaiTzeng, W. J.W. J.Tzeng李嗣涔Lee, Si-ChenSi-ChenLee2009-02-042018-07-062009-02-042018-07-061986http://ntur.lib.ntu.edu.tw//handle/246246/121509Hsinchuen-USOrigin of Boron Contamination of Intrinsic a-Si:H in Glow Dischargeconference paper