Using an ammonia treatment to improve the floating-gate spacing in split-gate flash memory

Chu, Wen-TingWen-TingChuLin, Hao-HsiungHao-HsiungLinTu, Yeur-LuenYeur-LuenTuWang, Yu-HsiungYu-HsiungWangHsieh, Chia-TaChia-TaHsiehSung, Hung-ChengHung-ChengSungLin, Yung-TaoYung-TaoLinTsai, Chia-ShiungChia-ShiungTsaiWang, C.S.C.S.WangHAO-HSIUNG LIN2018-09-102018-09-102004-09http://scholars.lib.ntu.edu.tw/handle/123456789/310421application/pdfapplication/pdf[SDGs]SDG6Using an ammonia treatment to improve the floating-gate spacing in split-gate flash memoryjournal article10.1109/LED.2004.8338252-s2.0-4444347821WOS:000223577600009