Simultaneous OPC- and CMP-aware routing based on accurate closed-form modeling.

Fang, Shao-YunShao-YunFangLin, Chung-WeiChung-WeiLinLiao, Guang-WanGuang-WanLiaoYAO-WEN CHANGCHUNG-WEI LIN2020-05-042020-05-042013https://scholars.lib.ntu.edu.tw/handle/123456789/488138[SDGs]SDG9Simultaneous OPC- and CMP-aware routing based on accurate closed-form modeling.conference paper10.1145/2451916.2451938https://doi.org/10.1145/2451916.2451938