High-quality nanothickness single-crystal Sc2O3 film grown on Si (111)

MINGHWEI HONGKortan, ARARKortanChang, PPChangHuang, YLYLHuangChen, CPCPChenChou, HYHYChouLee, HYHYLeeKwo, JJKwoChu, M-WM-WChuChen, CHCHChenothers2018-09-102018-09-102005http://scholars.lib.ntu.edu.tw/handle/123456789/315730High-quality nanothickness single-crystal Sc2O3 film grown on Si (111)journal article