Electrical characteristics of ultrathin Pt/Y<inf>2</inf>O<inf>3</inf>/Si capacitor with rapid post-metallisation annealing

Lay, T.S.T.S.LayLiu, W.D.W.D.LiuKwo, J.J.KwoMINGHWEI HONGMannaerts, J.P.J.P.Mannaerts2019-12-272019-12-272002https://scholars.lib.ntu.edu.tw/handle/123456789/443469[SDGs]SDG7Electrical characteristics of ultrathin Pt/Y<inf>2</inf>O<inf>3</inf>/Si capacitor with rapid post-metallisation annealingjournal article10.1049/el:200210582-s2.0-0037153512https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037153512&doi=10.1049%2fel%3a20021058&partnerID=40&md5=49b6d6cfa49210ab76f13f2e6dc99318