Applying low-energy multipulse excimer laser annealing to improve charge retention of Au nanocrystals embedded in MOS capacitors

Kuan-Yuan ShenHung-Ming ChenTing-Wei LiaoChieh-Hsiung KuanCHIEH-HSIUNG KUAN2019-10-312019-10-312015223727https://scholars.lib.ntu.edu.tw/handle/123456789/429845[SDGs]SDG6Applying low-energy multipulse excimer laser annealing to improve charge retention of Au nanocrystals embedded in MOS capacitorsjournal article10.1088/0022-3727/48/5/0551012-s2.0-84921768939